第五代 Nikon KrF 高吞吐量扫描仪采用超高 N.A. 镜头和改进的机身设计
第五代 Nikon KrF 高吞吐量扫描仪采用超高 N.A. 镜头和改进的机身设计
2000 年 7 月 10 日
NSR-S205C 曝光工具带有 0.75 数值孔径投影镜头，能够产生 0.13 微米的特征
加利福尼亚州旧金山，2000 年 7 月 10 日 – 半导体行业成像工具的领先供应商尼康今天宣布，公司正在接受其第五代扫描仪的订单，该扫描仪配备超高分辨率 0.75 数值孔径镜头。NSR-S205C 采用氟化氪准分子 （KrF） 激光系统，能够在生产环境中实现 0.13 微米的特征。
该公司拥有全球最大的步进机和深紫外 （DUV） 扫描仪安装基础，并于 1995 年推出了世界上第一台基于镜头的 DUV 扫描仪。NSR-S205C 的套刻精度为 < 30 nm，吞吐量为每小时 140 200 mm 晶圆或每小时 84 300 mm 晶圆。这种四比一的还原系统具有 25 mm x 33 mm 的曝光区域和新的主体设计，可最大限度地减少振动并改善温度控制。Nikon 计划今年出货 430 多台，并已指定其中约 40% 的产能配置为 KrF 扫描仪。尼康扩大的产能将于今年开始投入使用，并将在 2001 年为尼康提供 600+ 的总单位产能。
“这些新订单表明了尼康作为 DUV 扫描仪和步进机领先供应商的持续实力。我们重视与美国半导体制造领导者的长期合作关系，并致力于提供最好的产品和服务，“Nikon Precision Inc. 北美销售和营销副总裁 Frank Masciocchi 说。
“尼康通过推出 NSR-S205C DUV 扫描仪及其产能投资，继续展示其技术和市场领导地位，”NPI 销售和营销副总裁 Frank Masciocchi 说。“公司始终如一地提供新一代产品，以满足全球领先 IC 制造商的性能和可靠性需求，”他补充道。
Nikon Precision Inc. 是 Nikon Corp. 的北美子公司，Nikon Corp. 是微电子制造行业光刻设备的全球领导者，在全球安装了 6,100 多台设备。Nikon 提供业内最广泛的生产级步进机和扫描仪选择。这些产品服务于晶圆、光掩模、平板显示器和薄膜磁头行业。Nikon Precision 为尼康在北美提供服务、应用、培训、技术支持、销售和营销。
Fifth Generation Nikon KrF High-Throughput Scanner Features Ultra-high N.A. Lens and Improved Body Design
July 10, 2000
NSR-S205C Exposure Tool with 0.75 Numerical Aperture Projection Lens Is Capable of Producing 0.13-micron Features
SAN FRANCISCO, Calif., July 10, 2000 – Nikon, the leading supplier of imaging tools for the semiconductor industry, today announced that the company is accepting orders for its fifth-generation scanner with an ultra-high resolution 0.75 numerical aperture lens. Utilizing a krypton fluoride excimer (KrF) laser system, the NSR-S205C is capable of 0.13-micron features in a production environment.
The company, which has the largest worldwide installed base of steppers and deep ultra violet (DUV) scanners, introduced the world’s first lens-based DUV scanner in 1995. The NSR-S205C features an overlay accuracy of < 30 nm and a throughput of 140 200 mm wafers per hour or 84 300 mm wafers per hour. This four-to-one reduction system has a 25 mm x 33 mm exposure field and a new body design minimizes vibration and improves temperature control. Nikon is planning to ship over 430 units this year and has designated capacity for approximately 40% of these to be configured as KrF scanners. Nikon’s expanded capacity will begin to come on line this year and will provide Nikon with 600+ total unit capacity in the 2001 timeframe.
“These new orders demonstrate Nikon’s continuing strength as the leading supplier of DUV scanners and steppers. We value our long-term relationship with the leaders in semiconductor manufacturing in the US, and are dedicated to providing the best in products and service,” said Frank Masciocchi, vice president of North American Sales and Marketing at Nikon Precision Inc.
“Nikon continues to demonstrate its technology and market leadership with the introduction of the NSR-S205C DUV scanner and its investment in capacity,” stated Frank Masciocchi, Vice President of sales and marketing for NPI. “The company has consistently provided new generations of products to meet the performance and reliability needs of leading IC manufacturers worldwide,” he added.
Nikon Precision Inc. is the North American subsidiary of Nikon Corp., the world leader in lithography equipment for the microelectronics manufacturing industry with more than 6,100 units installed worldwide. Nikon offers the most extensive selection of production-class steppers and scanners in the industry. These products serve the wafer, photomask, flat panel display, and thin-film magnetic head industries. Nikon Precision provides service, applications, training, technical support, sales and marketing for Nikon in North America.
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深圳市矢量科学仪器有限公司是集半导体仪器装备代理及技术服务的国家级高新技术企业。 致力于提供半导体前道制程工艺装备、后道封装装备、半导体分析测试设备、半导体光电测试仪表及相关仪器装备维护、保养、售后技术支持及实验室整体...