Nikon 和 KLA-Tencor 宣布推出新的覆盖解决方案
Nikon 和 KLA-Tencor 宣布推出新的覆盖解决方案
2007 年 12 月 3 日
日本东京 – 2007 年 12 月 3 日 –尼康公司（Michio Kariya，总裁）和KLA-Tencor，全球半导体晶圆检查/计量工具的领导者（总裁兼首席运营官John Kispert：纳斯达克GS：KLAC）今天宣布他们将在2008年第一季度推出扫描仪匹配器（SMM），这是一种提高叠加精度的系统。SMM 系统在联合进行的基线评估中成功证明叠加精度提高了 30% 以上。该系统目前正在一家主要芯片制造商的真实工艺上进行评估和验证。
销售摘要
产品名称：扫描仪匹配器 （SMM） 系统
目标工具：NSR-S610C、NSR-S609B、NSR-S310F、NSR-S308F、NSR-S210D、NSR-S208D
（该产品将由尼康和 KLA-Tencor 提供。
销售启动期 2008 年第一季度
开发背景
随着设计规则缩小到 45 nm 及以上，需要以单个纳米级的精度曝光数十层电路图形，这反过来又使提高套刻精度变得至关重要。2005 年 ITRS 要求更严格的光刻覆盖预算。为了应对这种情况，尼康和 KLA-Tencor 针对客户的实际生产现场，研究了一种利用彼此优势和专业知识的系统。SMM 系统是集成和管理来自光刻集群的晶圆层数据的方案（包括 NSR 以外的光刻工具）和基于尼康专有的套刻校正技术提高精度的技术的集成。
该系统将在客户生产现场灵活有效地利用 NSR，并将成为未来提高芯片缺陷率、降低成本和加快新工艺技术产能爬坡时间的解决方案。
主要特点1 . 自动管理堆焊所需的大量工具数据
2 . 自动化以前手动
完成的复杂堆焊精度改进 3 . 快速有效地提高光刻工具（包括 NSR
以外的工具）的自动堆焊精度 4 . 通过简单的配置，仅使用软件和管理服务器进行系统介绍。
系统配置
在引入 SMM 时，仔细考虑了增强 Nikon 和 KLA-Tencor 已有的系统功能。套刻逻辑和套刻数据库/自动校正软件是联合开发的，并提供连接许可证，以便将系统轻松引入现有生产线，以增强尼康的 LEES 服务器（一种自我诊断信息管理系统）和 KLA-Tencor 的 K-T 分析仪 （KTA），一种与 K-T 的 Archer 套刻测量平台集成的信息集成管理服务器。
关于
KLA-TencorKLA-Tencor 是半导体制造和相关行业良率管理和过程控制解决方案的全球领导者。公司总部位于加利福尼亚州圣何塞，在世界各地设有销售和服务办事处。KLA-Tencor 是一家标准普尔 500 指数公司，在纳斯达克全球精选市场交易，代码为 KLAC。有关公司的其他信息，请访问 http://www.kla-tencor.com。
关于尼康
自 1980 年以来，尼康公司一直在通过创新产品和技术彻底改变光刻技术。该公司是微电子制造行业光刻设备的全球领导者，在全球安装了 7,800 多套曝光系统。Nikon 提供业内最广泛的生产级步进机和扫描仪选择。这些产品服务于半导体、平板显示器 （LCD） 和薄膜磁头 （TFH） 行业。Nikon Precision Inc. 在北美为 Nikon 光刻设备提供服务、培训、应用和技术支持，以及销售和营销。有关尼康的更多信息，请访问我们的网站 www.nikonprecision.com
前瞻性陈述
本新闻稿包含 1995 年《私人证券改革法案》中定义的前瞻性陈述，这些陈述受到已知和未知风险和不确定性的影响，可能导致实际结果与此类陈述中明示或暗示的结果存在重大差异。此类陈述受风险、不确定性和状况变化的影响， 特别是与行业要求和其他风险相关的风险。公司不承担更新本新闻稿中信息的义务。
Nikon and KLA-Tencor Announce New Overlay Solution
December 3, 2007
Tokyo, Japan – December 3, 2007 – Nikon Corporation (Michio Kariya, President) and KLA-Tencor, the world leader in semiconductor wafer inspection/metrology tools (President & COO John Kispert： Nasdaq GS: KLAC) today announced that they will launch Scanner Match Maker (SMM), a system for improving overlay accuracy, in the First Quarter of 2008. The SMM system successfully demonstrated over 30% improvement in overlay accuracy in a jointly conducted baseline assessment. The system is currently being evaluated and validated at a major chip maker on real processes.
Sales Summary
Product name: Scanner Match Maker (SMM) System
Target tools: NSR-S610C, NSR-S609B, NSR-S310F, NSR-S308F, NSR-S210D, NSR-S208D
(The product will be available both from Nikon and KLA-Tencor.)
Sales launch term First Quarter, 2008
Development Background
As design rules shrink to 45 nm and beyond, tens of layers of circuit patterns need to be exposed with a single nanometer level accuracy, which, in turn, makes it critical to improve overlay accuracy. The 2005 ITRS required tighter lithography overlay budgets. To respond to this, Nikon and KLA-Tencor have studied a system that utilizes each other’s strength and know-how in view of actual customer production sites. The SMM System is an integration of a scheme for integrating and managing wafer layer data from a lithocluster including lithography tools other than NSR and a technology for improving accuracy based on Nikon’s proprietary overlay correction technology.
The system will enable flexible and efficient utilization of NSR at customer production sites and will become a solution for chip defect rate improvement, cost reduction and accelerated ramp-up time for new process technology in the future.
Main Characteristics
1 ． Automated management of vast amount of tool data required for overlay
2 ． Automation of complex overlay accuracy improvement previously done manually
3 ． Quick and efficient automated overlay accuracy improvement among lithography tools, including tools other than NSR
4 ． System introduction using only software and management server made possible by simple configuration.
System Configuration
Careful consideration was given to enhancing features of the systems already available from Nikon and KLA-Tencor in introducing SMM. Overlay logic and overlay database/automatic correction software were jointly developed and offered with a connectivity license for easy introduction of the system into existing production lines to enhance Nikon’s LEES Server, a self diagnostics information management system, and KLA-Tencor’s K-T Analyzer (KTA), an information integration management server integrated with K-T’s Archer overlay metrology platform.
About KLA-Tencor
KLA-Tencor is the world leader in yield management and process control solutions for semiconductor manufacturing and related industries. Headquartered in San Jose, California, the Company has sales and service offices around the world. An S&P 500 company, KLA-Tencor is traded on the NASDAQ Global Select Market under the symbol KLAC. Additional information about the Company is available at http://www.kla-tencor.com.
About Nikon
Since 1980, Nikon Corporation has been revolutionizing lithography with innovative products and technologies. The company is a worldwide leader in lithography equipment for the microelectronics manufacturing industry with more than 7,800 exposure systems installed worldwide. Nikon offers the most extensive selection of production-class steppers and scanners in the industry. These products serve the semiconductor, flat panel display (LCD) and thin-film magnetic head (TFH) industries. Nikon Precision Inc. provides service, training, applications and technical support, as well as sales and marketing for Nikon lithography equipment in North America. For more information about Nikon, access our web site at www.nikonprecision.com
Forward Looking Statements
This press release contains forward-looking statements as that term is defined in the Private Securities Reform Act of 1995, which are subject to known and unknown risks and uncertainties that could cause actual results to differ materially from those expressed or implied by such statements Such statements are subject to risks, uncertainties and changes in condition, particularly those related to industry requirements and other risks. The Company undertakes no obligation to update the information in this press release.
厂家名称
深圳市矢量科学仪器有限公司是集半导体仪器装备代理及技术服务的国家级高新技术企业。 致力于提供半导体前道制程工艺装备、后道封装装备、半导体分析测试设备、半导体光电测试仪表及相关仪器装备维护、保养、售后技术支持及实验室整体...