Nikon 推出适用于先进 110 nm 器件的下一代 KrF 扫描仪 吞吐量比上一代产品提高 30%
Nikon 推出适用于先进 110 nm 器件的下一代 KrF 扫描仪 吞吐量比上一代产品提高 30%
2003 年 2 月 8 日
加利福尼亚州贝尔蒙特，2003 年 7 月 8 日 - 尼康公司在不到一周的时间里推出了第三套新系统 NSR-S207D。该系统针对正在量产的 110 nm 器件，是尼康成功的 KrF 扫描仪系列的第 7 代产品。该系统将高数值孔径 （0.82） 投影镜头与新开发的高生产率平台相结合，显著提高了吞吐量性能和对准精度。
Nikon 继续专注于具有高生产率的尖端技术。NSR-S207D 每小时可处理超过 160 – 200 毫米的晶圆和超过 115 – 300 毫米的晶圆，比上一代 KrF 扫描仪增加了 30%。新平台将高加速度晶圆和掩模平台与优化的晶圆处理相结合，以提高吞吐量和对准精度。
为了确保整个晶圆的紧密轮廓和 CD 控制，Nikon 设计了业内具有最低像差和眩光水平的投影镜头。高品质的材料和专有的制造技术提供了近乎完美的镜头。NSR-S207D 包括详细的环境控制系统，以确保镜头质量在产品的使用寿命内保持不变。尼康的镜头因其高品质和耐用性而享誉业界。
“随着本周推出的三款新系统，尼康现在为我们的客户提供了完整的新产品，以满足他们的技术和生产力要求，”尼康精密公司首席执行官 Geoff Wild 说，“专注于领先应用的客户将认识到，使用我们的新型 KrF 和 ArF 步进机和扫描仪可以节省大量成本。
Nikon 将于今年 10 月之后开始出货系统。
关于尼康
自 1980 年以来，尼康公司一直在通过创新产品和技术彻底改变光刻技术。该公司是微电子制造行业光刻设备的全球领导者，在全球安装了 7,200 多套曝光系统。Nikon 提供业内最广泛的生产级步进机和扫描仪选择。这些产品服务于半导体、平板显示器 （LCD） 和薄膜磁头 （TFH） 行业。Nikon Precision Inc. 在北美为 Nikon 光刻设备提供服务、培训、应用和技术支持，以及销售和营销。
###
本新闻稿包含 1995 年《私人证券改革法案》中定义的前瞻性陈述，这些陈述受到已知和未知风险和不确定性的影响，可能导致实际结果与此类陈述中明示或暗示的结果存在重大差异。此类陈述受风险、不确定性和状况变化的影响，尤其是与行业要求和其他风险相关的陈述。公司不承担更新本新闻稿中信息的义务。
Nikon Introduces Next Generation KrF Scanner for Advanced 110 nm Devices Throughput boosted 30% over previous generation
February 8, 2003
Belmont, Calif., July 8, 2003 -Nikon Corporation launched its third new system in less than a week, the NSR-S207D. Targeted at 110 nm devices that are ramping into volume production, the system is the 7th generation of Nikon’s successful KrF scanner series. The system combines a high NA (0.82) projection lens with a newly developed, high productivity platform, significantly improving throughput performance and alignment accuracy.
Nikon continues its focus on leading-edge technology with high productivity. The NSR-S207D can process more than 160 – 200 mm wafers per hour and more than 115 – 300 mm wafers per hour, an increase of 30% over the previous generation KrF scanner. The new platform incorporates high acceleration wafer and reticle stages with optimized wafer handling to increase throughput and alignment accuracy.
To ensure tight profile and CD control across the wafer, Nikon designed the projection lens with the lowest aberration and flare levels in the industry. High quality materials and proprietary manufacturing technology provides a virtually perfect lens. The NSR-S207D includes detailed environment control systems to ensure the lens quality is maintained over the life of the product. Nikon’s lenses are recognized throughout the industry for their high quality and durability.
“With three new systems introduced this week, Nikon now offers our customers a complete range of new products to meet their technical and productivity requirements”, stated Geoff Wild, CEO of Nikon Precision, Inc. “Customers focused on leading-edge applications will recognize significant cost savings with our new KrF and ArF steppers and scanners.
Nikon will begin shipping systems after October of this year.
About Nikon
Since 1980, Nikon Corporation has been revolutionizing lithography with innovative products and technologies. The company is a worldwide leader in lithography equipment for the microelectronics manufacturing industry with more than 7,200 exposure systems installed worldwide. Nikon offers the most extensive selection of production-class steppers and scanners in the industry. These products serve the semiconductor, flat panel display (LCD) and thin-film magnetic head (TFH) industries. Nikon Precision Inc. provides service, training, applications and technical support, as well as sales and marketing for Nikon lithography equipment in North America.
###
This press release contains forward-looking statements as that term is defined in the Private Securities Reform Act of 1995, which are subject to known and unknown risks and uncertainties that could cause actual results to differ materially from those expressed or implied by such statements. Such statements are subject to risks, uncertainties and changes in condition, particularly those related to industry requirements and other risks. The Company undertakes no obligation to update the information in this press release.
厂家名称
深圳市矢量科学仪器有限公司是集半导体仪器装备代理及技术服务的国家级高新技术企业。 致力于提供半导体前道制程工艺装备、后道封装装备、半导体分析测试设备、半导体光电测试仪表及相关仪器装备维护、保养、售后技术支持及实验室整体...