General specification for MEMS electric field sensor (English Version)
GB/T 35086-2018 General Technical Requirements for MEMS Electric Field Sensors, a national standard of the People's Republic of China, specifies the raw materials, structural composition, technical requirements, test items and methods, inspection rules, as well as marking, packaging, storage and transportation of MEMS electric field sensors.
With the development of micro-electromechanical systems (MEMS) technology, electric field sensors have been widely used in meteorological detection, industrial automation, environmental monitoring and other fields. The formulation of this standard aims to standardize the technical requirements of MEMS electric field sensors and ensure product quality and performance consistency.
Technical parameters | Indicator requirements | Test method |
---|---|---|
Measuring range | a) Lower limit absolute value: 0, 10, 20, 50, 100, 200, 300, 400 V/m, 500 V/m, 1000 V/m; b) Upper limit absolute value: 2 kV/m, 5 kV/m, 10 kV/m, 20 kV/m, 30 kV/m, 50 kV/m, 100 kV/m, 200 kV/m | Apply lower and upper limit electric fields, record the output values and take the arithmetic average |
Zero point output | No more than ±2% | Apply zero electric field, record 3 data and take average |
Linearity | No more than 10% | Evenly select points within the measurement range and calculate the maximum deviation between the actual characteristic curve and the reference straight line |
This standard mainly focuses on the performance, environmental adaptability and electromagnetic compatibility of sensors. The following table compares the core indicators in detail:
Sensitivity calculation example: Assuming that the output values of the sensor within the measurement range are Y_max and Y_min, the sensitivity S = (Y_max - Y_min)/(X_max - X_min). For example, when E_max=10kV/m, the output signal is 5V; when E_min=0V, the output signal is 0V, then the sensitivity S=5V/(10kV/m)=0.5V/(kV/m).
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