GB/T 36969-2018 (English Version)

Standard No.: GB/T 36969-2018
Language: Chinese, Available in English version
Release Date: 2018
Published By: General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China
Latest: GB/T 36969-2018

Scope: This standard specifies the principle, test conditions, equipment, samples, test steps and data processing for measuring the thickness of nano-films using atomic force microscopy (AFM). This standard is applicable to inorganic thin films with uniform and flat surfaces and nanometer thickness. The thickness measurement of thicker and some organic films can also be implemented as a reference.

Introduction

1. Background and significance of standardization

GB/T 36969-2018 was proposed by the Chinese Academy of Sciences, and the main drafting units include Shanghai Jiao Tong University and the National Engineering Research Center for Nanotechnology and Applications. The formulation of this standard fills the gap in the field of measuring the thickness of nanofilms using atomic force microscopy (AFM) in China.

2. Comparison of standard frameworks

Standard dimensions	GB/T 36969—2018	Comparison reference standards
Scope of application	Nano film thickness measurement (inorganic materials)	GB/T 31227 (surface roughness measurement)
Test conditions	Ambient temperature: 20°C±5°C, relative humidity ≤60%	-
Equipment requirements	Contact mode, tapping mode and PeakForce mode are recommended	JJF 1059.1 (measurement uncertainty)

3. Technical principles and implementation suggestions

Technical principles:The microscopic morphology of the nanofilm steps is obtained through AFM testing, and the thickness is calculated using the height difference. When processing data, it is necessary to pay attention to removing 5%-10% of the data points on both sides of the steps, and select at least three areas for testing.

Implementation suggestions:

Equipment calibration: Regularly use standard samples to calibrate the xy and z dimensions of the instrument.
Probe selection: Select a probe with a suitable elastic coefficient according to the test mode to avoid scratching the sample surface.
Data processing: Ensure the reasonable selection of data points in the step height calculation formula (see formula 1) to reduce human errors.

GB/T 36969-2018 Referenced Document

GB/T 31227 Test method for the surface roughness by atomic force microscope for sputtered thin films
JJF 1059.1-2012 Evaluation and Expression of Uncertainty in Measurement

GB/T 36969-2018 history

2018 GB/T 36969-2018 Nanotechnology—Method for the measurement of the nanofilm-thickness by atomic force microscopy